Holographic fabrication of 3D photonic crystals using silicon based reflective optics element

We present a silicon based single optical element that is able to automatically generate desired laser beam polarizations and intensities for the holographic fabrication of woodpile-type photonic crystal templates. A polydimethylsiloxane (PDMS) mold based reflective optics element is fabricated for the generation of five-beam interferences where four beams are arranged four-fold symmetrically around a central beam. Silicon chips in the inner surfaces of the mold are used to reflect the circularly or elliptically polarized beam into four side beams that are linearly polarized with electric fields normal to the incident plane, and reduce their laser intensities. Photonic crystal templates are holographically fabricated in a photosensitive polymer through this silicon-on-PDMS based single optical element and single beam based configuration. ©2012 Optical Society of America OCIS codes: (160.5298) Photonic crystals; (090.2890) Holographic optical elements; (220.3740) Lithography. References and links 1. J. D. Joannopoulos, R. D. Meade, and J. N. Winn, Photonic Crystals (Princeton, 1995). 2. S. Noda, M. Yokoyama, M. Imada, A. Chutinan, and M. Mochizuki, “Polarization mode control of twodimensional photonic crystal laser by unit cell structure design,” Science 293(5532), 1123–1125 (2001). 3. K. P. Chen, B. McMillan, and L. Cashdollar, “Self-heated fiber Bragg grating sensors,” Appl. Phys. Lett. 86, 143503 (2005). 4. Y. Liu, F. Qin, Z.-M. Meng, F. Zhou, Q.-H. Mao, and Z.-Y. Li, “All-optical logic gates based on twodimensional low-refractive-index nonlinear photonic crystal slabs,” Opt. Express 19(3), 1945–1953 (2011), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-3-1945. 5. A. Tandaechanurat, S. Ishida, D. Guimard, M. Nomura, S. Iwamoto, and Y. Arakawa, “Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap,” Nat. Photonics 5(2), 91–94 (2011). 6. K. M. Ho, C. T. Chan, C. M. Soukoulis, R. Biswas, and M. Sigalas, “Photonic band gaps in three dimensions: new layer-by-layer periodic structures,” Solid State Commun. 89(5), 413–416 (1994). 7. A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S. W. Leonard, C. Lopez, F. Meseguer, H. Miguez, J. P. Mondia, G. A. Ozin, O. Toader, A. Geoffrey, O. Toader, and H. M. van Driel, “Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres,” Nature 405(6785), 437–440 (2000). 8. M. Deubel, G. von Freymann, M. Wegener, S. Pereira, K. Busch, and C. M. Soukoulis, “Direct laser writing of three-dimensional photonic-crystal templates for telecommunications,” Nat. Mater. 3(7), 444–447 (2004). 9. A. J. Turberfield, M. Campbell, D. N. Sharp, M. T. Harrison, and R. G. Denning, “Fabrication of photonic crystals for the visible spectrum by holographic lithography,” Nature 404(6773), 53–56 (2000). 10. S. Yang, M. Megens, J. Aizenberg, P. Wiltzius, P. M. Chaikin, and W. B. Russel, “Creating periodic threedimensional structures by multibeam interference of visible laser,” Chem. Mater. 14(7), 2831–2833 (2002). 11. Y. Lin, P. R. Herman, and K. Darmawikarta, “Design and holographic fabrication of tetragonal and cubic photonic crystals with phase mask: toward the mass-production of three-dimensional photonic crystals,” Appl. Phys. Lett. 86(7), 071117 (2005). 12. Y. Lin, A. Harb, D. Rodriguez, K. Lozano, D. Xu, and K. P. Chen, “Fabrication of two-layer integrated phase mask for single-beam and single-exposure fabrication of three-dimensional photonic crystal,” Opt. Express 16(12), 9165–9172 (2008), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-16-12-9165. #170146 $15.00 USD Received 7 Jun 2012; revised 27 Jul 2012; accepted 4 Aug 2012; published 9 Aug 2012 (C) 2012 OSA 1 September 2012 / Vol. 2, No. 9 / OPTICAL MATERIALS EXPRESS 1236 13. D. Chanda, L. E. Abolghasemi, M. Haque, M. L. Ng, and P. R. Herman, “Multi-level diffractive optics for single laser exposure fabrication of telecom-band diamond-like 3-dimensional photonic crystals,” Opt. Express 16(20), 15402–15414 (2008), http://www.opticsexpress.org/abstract.cfm?URI=OPEX-16-20-15402. 14. K. Ohlinger, H. Zhang, Y. Lin, D. Xu, and K. P. Chen, “A tunable three layer phase mask for single laser exposure 3D photonic crystal generations: bandgap simulation and holographic fabrication,” Opt. Mater. Express 1(5), 1034–1039 (2011), http://www.opticsinfobase.org/ome/abstract.cfm?URI=ome-1-5-1034. 15. Y. K. Pang, J. C. Lee, C. T. Ho, and W. Y. Tam, “Realization of woodpile structure using optical interference holography,” Opt. Express 14(20), 9113–9119 (2006), http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe14-20-9113. 16. D. Xu, K. P. Chen, A. Harb, D. Rodriguez, K. Lozano, and Y. Lin, “Phase tunable holographic fabrication for three-dimensional photonic crystal templates by using a single optical element,” Appl. Phys. Lett. 94(23), 231116 (2009). 17. S.-G. Park, M. Miyake, S.-M. Yang, and P. V. Braun, “Cu2O inverse woodpile photonic crystals by prism holographic lithography and electrodeposition,” Adv. Mater. 23(24), 2749–2752 (2011). 18. T. Y. M. Chan, O. Toader, and S. John, “Photonic band-gap formation by optical-phase-mask lithography,” Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 73(4), 046610 (2006). 19. O. Toader, T. Y. M. Chan, and S. John, “Diamond photonic band gap synthesis by umbrella holographic lithography,” Appl. Phys. Lett. 89(10), 101117 (2006). 20. D. F. Edwards, “Silicon (Si),” in Handbook of Optical Constants of Solids, E. D. Palik, ed. (Academic, 1985).